Test apparatus and recording medium

ABSTRACT

Provided is a test apparatus that tests a device under test, comprising a plurality of test modules that test the device under test; and a control section that controls the plurality of test modules. Each test module includes a test section that tests the device under test; and a self-diagnostic section that diagnoses operation of the test section based on diagnostic data supplied thereto. The control section supplies the diagnostic data in parallel to self-diagnostic sections for which the same type of diagnostic data is set, and supplies the diagnostic data sequentially to self-diagnostic sections for which a different type of diagnostic data is set.

CROSS REFERENCE TO RELATED APPLICATION

This is a continuation application of PCT/JP2008/061978 filed on Jul. 2,2008, the contents of which are incorporated herein by reference.

BACKGROUND

1. Technical Field

The present invention relates to a test apparatus and a recordingmedium.

2. Related Art

A known conventional test apparatus uses a plurality of test modules totest a device under test such as a semiconductor circuit, as in, forexample, Japanese Patent Application Publication No. 2006-317256. Thesetest modules are exchangeable in an input/output interface. The testapparatus includes a plurality of slots for holding test modules thatcan be exchanged with other test modules. With this configuration, thetest apparatus tests the device under test using a variety of testmodules.

The test apparatus has a diagnostic function to determine whether thetest modules are operating correctly. For example, the test apparatusmay perform a test in which the output signal of each test module ismeasured after being looped back and input to the test module thatoutput the signal, or a test in which this looped back signal is inputto a different test module.

In the test apparatus that holds each test module to be exchangeable,the test module inserted into each slot is not constant. Each type oftest module may perform a different diagnostic process. Therefore, thetest apparatus references a configuration file indicating the type oftest module inserted into each slot, and performs diagnostic processescorresponding respectively to the types of test modules.

FIG. 7 shows an exemplary diagnostic operation performed by a pluralityof test modules. The test apparatus of FIG. 7 diagnoses test modules Ato F. The CPU of the test apparatus determines the type of diagnosis tobe performed for each test module based on the configuration file. TheCPU sets diagnostic data corresponding to the determined diagnosticcontent in the test module A (process 102).

After setting the diagnostic data for the test module A, the CPU of thetest apparatus supplies the test module A with a command too perform aself-diagnosis (process 104). After the test module A performs theself-diagnosis, the CPU of the test apparatus analyzes theself-diagnosis result (process 106). By performing the processes 102 to106 sequentially for each of the test modules, the CPU causes all of thetest modules to perform the self-diagnosis.

In the above self-diagnosis processes, however, the test modules performthe self-diagnoses in sequence, and so a long time is needed for all ofthe test modules to finish the self diagnosis processes. This isparticularly problematic when a large number of test modules areprovided to the test apparatus.

SUMMARY

Therefore, it is an object of an aspect of the innovations herein toprovide a test apparatus and a recording medium, which are capable ofovercoming the above drawbacks accompanying the related art. The aboveand other objects can be achieved by combinations described in theindependent claims. The dependent claims define further advantageous andexemplary combinations of the innovations herein.

According to a first aspect related to the innovations herein, oneexemplary test apparatus may include a test apparatus that tests adevice under test, comprising a plurality of test modules that test thedevice under test; and a control section that controls the plurality oftest modules. Each test module includes a test section that tests thedevice under test; and a self-diagnostic section that diagnosesoperation of the test section based on diagnostic data supplied thereto.The control section supplies the diagnostic data in parallel toself-diagnostic sections for which the same type of diagnostic data isset, and supplies the diagnostic data sequentially to self-diagnosticsections for which a different type of diagnostic data is set.

According to a second aspect related to the innovations herein, oneexemplary recording medium may include a recording medium storingthereon a program that causes a test apparatus to function to test adevice under test, the program causing (i) the test apparatus tofunction as a plurality of test modules that test the device under test;and a control section that controls the plurality of test modules; (ii)each test module to function as a test section that tests the deviceunder test; and a self-diagnostic section that diagnoses operation ofthe test section based on diagnostic data supplied thereto; and (iii)the control section to supply the diagnostic data in parallel toself-diagnostic sections for which the same type of diagnostic data isset, and to supply the diagnostic data sequentially to self-diagnosticsections for which a different type diagnostic data is set.

The summary clause does not necessarily describe all necessary featuresof the embodiments of the present invention. The present invention mayalso be a sub-combination of the features described above. The above andother features and advantages of the present invention will become moreapparent from the following description of the embodiments taken inconjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an exemplary configuration of a test apparatus 100according to an embodiment of the present invention.

FIG. 2 shows an exemplary configuration of a test module 40.

FIG. 3 shows an exemplary operation of the test apparatus 100 whendiagnosing a plurality of test modules 40.

FIG. 4 shows an exemplary functional configuration of the controlsection 20.

FIG. 5 shows another exemplary operation of the test apparatus 100 whendiagnosing a plurality of test modules 40.

FIG. 6 shows an example of a hardware configuration of a computer 1900according to the present embodiment.

FIG. 7 shows an exemplary diagnostic operation performed by a pluralityof test modules.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, some embodiments of the present invention will bedescribed. The embodiments do not limit the invention according to theclaims, and all the combinations of the features described in theembodiments are not necessarily essential to means provided by aspectsof the invention.

FIG. 1 shows an exemplary configuration of a test apparatus 100according to an embodiment of the present invention. The test apparatus100 tests a device under test 200 such as a semiconductor circuit. Thetest apparatus 100 includes an information storing section 10, a busline 12, a control section 20, and a plurality of test modules 40.

Each test module 40 is inserted into a slot in the test apparatus 100.Each test module 40 inserted into a slot tests the device under test 200by exchanging signals with the device under test 200.

Each test module 40 may have a different function. For example, acertain test module 40 may have a function to supply a test signalhaving a prescribed logic pattern to the device under test 200, andanother test module 40 may have a function to supply the device undertest 200 with an operation clock, supply power, or the like. The testapparatus 100 tests the device under test 200 by causing the pluralityof test modules 40 to operate in parallel.

The test apparatus 100 may test a single device under test 200. In thiscase, each test module 40 is electrically connected to a correspondingpin of the device under test 200. The test apparatus 100 may test aplurality of devices under test 200 in parallel. In this case, each testmodule 40 is electrically connected to a corresponding pin in acorresponding device under test 200.

The control section 20 includes a CPU and controls the test modules 40via a bus line 12. For example, the control section 20 may control thetest modules 40 according to a predetermined program.

The information storing section 10 stores module information thatindicates, for each slot of the test apparatus 100, what function thetest module 40 inserted into the slot has. The information storingsection 10 may record identification information for the test moduleinserted into each slot, information indicating control data or the liketo be supplied to the test module when testing the device under test200, information indicating diagnostic data used when the test moduleperforms a self-diagnosis, and the like.

The module information may be updated by a user every time a test module40 is exchanged. When a test module 40 is exchanged, the test apparatus100 may detect the identification information or the like of this testmodule 40, and update the module information stored in the informationstoring section 10.

When testing the device under test 200, the control section 20 maysupply each slot with control data or the like based on the moduleinformation stored in the information storing section 10. As a result,the test apparatus 100 can test the device under test 200 using a largenumber of test modules 40.

The test apparatus 100 diagnoses whether each test module 40 isoperating correctly. When performing a diagnosis of a test module 40,the control section 20 supplies the test module 40 in each slot withdiagnostic data used in the diagnosis, based on the module informationstored by the information storing section 10. As a result, the testapparatus 100 can diagnose a large number of test modules 40.

When diagnosing a test module 40, the test apparatus 100 may be providedwith a diagnostic circuit in place of the device under test 200. Thediagnostic circuit may input signals received from each test module 40respectively into the test module 40 from which the signal is received,or into another test module 40.

FIG. 2 shows an exemplary configuration of a test module 40. The testmodule 40 includes a test section 42, a self-diagnostic section 44, anda setting memory 46. The test section 42 tests the device under test 200by exchanging signals with a prescribed pin of the device under test200.

For example, the test section 42 may include a circuit that generates atest signal having a prescribed logic pattern and supplies this testsignal to the device under test 200, or may include a circuit thatmeasures a response signal output by the device under test 200 to judgethe acceptability of the device under test 200. The test section 42 mayreceive control data from the control section 20 via the bus line 12.The test section 42 may notify the control section 20 of anacceptability judgment result of the device under test 200 via the busline 12.

The self-diagnostic section 44 diagnoses whether the test section 42 isoperating correctly based on the diagnostic data applied thereto. Forexample, the self-diagnostic section 44 may output a prescribeddiagnostic signal to the test section 42 according to the diagnosticdata supplied thereto. The self-diagnostic section 44 may cause the testsection 42 to measure the diagnostic signal input thereto, and mayacquire the measurement result. When the measurement result matches aprescribed reference value, the control section 20 may judge that thetest module 40 that output the diagnostic signal and the test module 40that measured the diagnostic signal are operating correctly. Asdescribed above, the test module 40 that outputs the diagnostic signalmay be the same test module 40 that receives the diagnostic signal.

The self-diagnostic section 44 may receive an initiation command tostart diagnosis of the test section 42 from the control section 20 viathe bus line 12. The self-diagnostic section 44 may notify the controlsection 20 of a diagnosis result of the test section 42 via the bus line12.

The setting memory 46 receives the diagnostic data supplied from thecontrol section 20 via the bus line 12, and stores this data. Whendiagnosing the test section 42, the self-diagnostic section 44 mayreference the diagnostic data stored in the setting memory 46.

FIG. 3 shows an exemplary operation of the test apparatus 100 whendiagnosing a plurality of test modules 40. FIG. 3 shows the operation ofeach test module 40. Test modules A through F are used as examples inFIG. 3, but the number of test modules 40 is not limited to the numbershown in FIG. 3.

In this diagnosis process, the control section 20 supplies diagnosticdata in parallel to the self-diagnostic sections 44 of the test modules40 that are to use the same diagnostic data. The control section 20supplies diagnostic data sequentially to the self-diagnostic sections 44of the test modules 40 that are to use different diagnostic data.

For example, the self-diagnostic sections 44 in the same type of testmodules 40 use the same diagnostic data to diagnose the test sections42. By measuring the diagnostic signal output by a certain test module40 with a different test module 40, even when diagnosing these testmodules 40, the self-diagnostic sections 44 in these test modules 40 maydiagnose the test sections 42 using the same diagnostic data.

The control section 20 extracts a group of test modules 40 that use thesame diagnostic data, for each type of diagnostic data, based on themodule information stored in the information storing section 10. In thepresent embodiment, the test modules 40-A and 40-B are extracted as afirst group, and the test modules 40-E and 40-F are extracted as asecond group.

First, the control section 20 supplies the prescribed diagnostic data inparallel to the setting memories 46 of the test modules 40 in the firstgroup (process 102-1). After the diagnostic data is set for the settingmemories 46 in the first group, the control section 20 supplies theprescribed diagnostic data in parallel to the setting memories 46 of thetest modules 40 in the second group (process 102-2).

After the diagnostic data is set for the setting memories 46 of the testmodules 40 in all of the groups, the control section 20 causes theself-diagnostic sections 44 in all of the test modules 40 to diagnosethe corresponding test sections 42 (processes 104-1 and 104-2). Forexample, upon receiving notification from all of the test modules 40that setting of the diagnostic data is finished, the control section 20supplies all of the test modules 40 in parallel with an initiationcommand to begin diagnosing the test sections 42.

After all of the test modules 40 have completed the diagnoses of thetest sections 42, the control section 20 analyzes the diagnosis resultfor each self-diagnostic section 44. The analysis of the diagnosisresults uses a different expected value for each test module 40, and sothe control section 20 may sequentially analyze the diagnosis results ofthe test modules 40.

The test apparatus 100 of the present embodiment supplies the diagnosticdata in parallel to the test modules 40 that use the same diagnosticdata for diagnosing the test sections 42, and can therefore decrease thetotal time needed to supply diagnostic data to a plurality of testmodules 40. Furthermore, the test apparatus 100 of the presentembodiment supplies the plurality of test modules 40 in parallel withthe initiation command to begin diagnosing the test sections 42, and cantherefore perform the diagnosis processes in parallel to decrease thetotal time needed to diagnose a plurality of test sections 42.

FIG. 4 shows an exemplary functional configuration of the controlsection 20. The control section 20 includes a group extracting section22, a command supply section 24, and a diagnostic data supply section26. The group extracting section 22 extracts a group of self-diagnosticsections 44 for which the same diagnostic data is to be set, for eachtype of diagnostic data, based on the module information stored by theinformation storing section 10. For example, the group extractingsection 22 may extract these groups based on the identificationinformation stored by the information storing section 10 indicating thetype of each test module 40 or information stored by the informationstoring section 10 indicating the function of each test module 40. Thegroup extracting section 22 may extract these groups based oninformation stored by the information storing section 10 indicatingdiagnostic data to be set for each test module 40.

The diagnostic data supply section 26 supplies the diagnostic datasequentially to the groups extracted by the group extracting section 22.The diagnostic data supply section 26 may supply the diagnostic data viathe bus line 12. As described above, the diagnostic data supply section26 supplies the same diagnostic data in parallel to the test modules 40in the same group.

When the diagnostic data supply section 26 has set diagnostic data fortall of the groups, the command supply section 24 causes theself-diagnostic section 44 of each test module 40 to test thecorresponding test section 42 in parallel. Upon receiving notificationfrom all of the test modules 40 that the diagnostic data has been set,the command supply section 24 may supply the initiation command to beginthe diagnosis to the self-diagnostic sections 44 of all the test modules40. With this configuration, the test apparatus 100 can cause the testmodules 40 to perform efficient self diagnosis.

The command supply section 24 may be connected to each test module 40via the bus line 12. The command supply section 24 may determine whichtest modules 40 are to be supplied with the initiation command based onthe module information stored by the information storing section 10. Thecommand supply section 24 may supply the initiation command to the testmodules 40 indicated by the group extracting section 22.

FIG. 5 shows another exemplary operation of the test apparatus 100 whendiagnosing a plurality of test modules 40. The diagnostic data supplysection 26 of the present embodiment supplies the diagnostic data to atleast one group while the self-diagnostic sections 44 of another groupare diagnosing the test sections 42. For example, while theself-diagnostic sections 44 in the first group are diagnosing the testsections 42 (process 104-1), the diagnostic data supply section 26 maysupply the diagnostic data to the setting memories 46 in the secondgroup (process 102-2).

In this case, when the setting of diagnostic data for the first group iscompleted, the command supply section 24 supplies the first group withthe initiation command to begin diagnosing the test sections 42 (process104-1). After the command supply section 24 has supplied the initiationcommand to the first group, the diagnostic data supply section 26 mayset the diagnostic data for the second group (process 104-2). In thisway, the waiting time between process 102-1 and process 104-1 can beshortened.

The diagnostic data supply section 26 may supply the diagnostic data tothe groups extracted by the group extracting section 22 sequentially inan order beginning with the group needing the longest time to diagnosethe test sections 42, i.e. the group whose process 104 takes the longesttime. In this way, the time needed to diagnose all of the test sections42 is shortened.

FIG. 6 shows an example of a hardware configuration of a computer 1900according to the present embodiment. The computer 1900 may function asat least a portion of the test apparatus 100 described in relation toFIGS. 1 to 5. For example, the computer 1900 may function as the controlsection 20 and the information storing section 10 of the test apparatus100.

The computer 1900 according to the present embodiment is provided with aCPU peripheral, an input/output section, and a legacy input/outputsection. The CPU peripheral includes a CPU 2000, a RAM 2020, a graphiccontroller 2075, and a displaying apparatus 2080, all of which areconnected to each other by a host controller 2082. The CPU 2000 mayfunction as the control section 20. The RAM 2020 may function as theinformation storing section 10.

The input/output section includes a communication interface 2030, a harddisk drive 2040, and a CD-ROM drive 2060, all of which are connected tothe host controller 2082 by an input/output controller 2084. The legacyinput/output section includes a ROM 2010, a flexible disk drive 2050,and an input/output chip 2070, all of which are connected to theinput/output controller 2084.

The host controller 2082 is connected to the RAM 2020 and is alsoconnected to the CPU 2000 and graphic controller 2075 accessing the RAM2020 at a high transfer rate. The CPU 2000 operates to control eachsection based on programs stored in the ROM 2010 and the RAM 2020. Thegraphic controller 2075 acquires image data generated by the CPU 2000 orthe like on a frame buffer disposed inside the RAM 2020 and displays theimage data in the displaying apparatus 2080. In addition, the graphiccontroller 2075 may internally include the frame buffer storing theimage data generated by the CPU 2000 or the like.

The input/output controller 2084 connects the communication interface2030 serving as a relatively high speed input/output apparatus, the harddisk drive 2040, and the CD-ROM drive 2060 to the host controller 2082.The communication interface 2030 communicates with other apparatuses viaa network. The hard disk drive 2040 stores the programs and data used bythe CPU 2000 housed in the computer 1900. The CD-ROM drive 2060 readsthe programs and data from a CD-ROM 2095 and provides the readinformation to the hard disk drive 2040 via the RAM 2020.

Furthermore, the input/output controller 2084 is connected to the ROM2010, and is also connected to the flexible disk drive 2050 and theinput/output chip 2070 serving as a relatively high speed input/outputapparatus. The ROM 2010 stores a boot program performed when thecomputer 1900 starts up, a program relying on the hardware of thecomputer 1900, and the like. The flexible disk drive 2050 reads programsor data from a flexible disk 2090 and supplies the read information tothe hard disk drive 2040 via the RAM 2020. The input/output chip 2070connects the flexible disk drive 2050 to each of the input/outputapparatuses via, for example, a parallel port, a serial port, a keyboardport, a mouse port, or the like.

The programs provided to the hard disk drive 2040 via the RAM 2020 arestored in a storage medium, such as the flexible disk 2090, the CD-ROM2095, or an IC card, and provided by a user. The programs are read fromstorage medium, installed in the hard disk drive 2040 inside thecomputer 1900 via the RAM 2020, and performed by the CPU 2000.

The programs are installed in the computer 1900. These programs causethe computer 1900 to function as a portion of the test apparatus 100.

The programs shown above may also be stored in an external storagemedium. The flexible disk 2090, the CD-ROM 2095, an optical storagemedium such as a DVD or CD, a magneto-optical storage medium, a tapemedium, a semiconductor memory such as an IC card, or the like can beused as the storage medium. Furthermore, a storage apparatus such as ahard disk or RAM that is provided with a server system connected to theInternet or a specialized communication network may be used to providethe programs to the computer 1900 via the network.

While the embodiments of the present invention have been described, thetechnical scope of the invention is not limited to the above describedembodiments. It is apparent to persons skilled in the art that variousalterations and improvements can be added to the above-describedembodiments. It is also apparent from the scope of the claims that theembodiments added with such alterations or improvements can be includedin the technical scope of the invention.

The operations, procedures, steps, and stages of each process performedby an apparatus, system, program, and method shown in the claims,embodiments, or diagrams can be performed in any order as long as theorder is not indicated by “prior to,” “before,” or the like and as longas the output from a previous process is not used in a later process.Even if the process flow is described using phrases such as “first” or“next” in the claims, embodiments, or diagrams, it does not necessarilymean that the process must be performed in this order.

1. A test apparatus that tests a device under test, comprising: aplurality of test modules that test the device under test; and a controlsection that controls the plurality of test modules, wherein each testmodule includes: a test section that tests the device under test; and aself-diagnostic section that diagnoses operation of the test sectionbased on diagnostic data supplied thereto, and the control sectionsupplies the diagnostic data in parallel to self-diagnostic sections forwhich the same type of diagnostic data is set, and supplies thediagnostic data sequentially to self-diagnostic sections for which adifferent type of diagnostic data is set.
 2. The test apparatusaccording to claim 1, further comprising an information storing sectionthat stores module information relating to a function of each testmodule, wherein the control section supplies the diagnostic data to eachself-diagnostic section based on the module information.
 3. The testapparatus according to claim 2, wherein the control section includes: agroup extracting section that extracts a group of self-diagnosticsections for which the same type of diagnostic data is to be set, foreach type of diagnostic data, based on the module information stored inthe information storing section; and a diagnostic data supply sectionthat supplies a corresponding type of diagnostic data in parallel toeach group of self-diagnostic sections.
 4. The test apparatus accordingto claim 3, wherein the control section causes each self-diagnosticsection to diagnose the corresponding test section in parallel.
 5. Thetest apparatus according to claim 4, wherein the control section furtherincludes a command supply section that supplies an initiation commandfor diagnosing the test sections in parallel to a plurality of theself-diagnostic sections.
 6. The test apparatus according to claim 5,wherein when the diagnostic data supply section has set the diagnosticdata for all of the groups, the command supply section supplies theself-diagnostic sections with the initiation command in parallel.
 7. Thetest apparatus according to claim 5, wherein the command supply sectionsupplies the initiation command in sequence beginning with a group thatfirst finishes setting the diagnostic data from the diagnostic datasupply section.
 8. The test apparatus according to claim 7, wherein thediagnostic data supply section sets the diagnostic data for at least onegroup while the self-diagnostic sections in another group are diagnosingthe corresponding test sections.
 9. The test apparatus according toclaim 8, wherein the diagnostic data supply section supplies thediagnostic data in sequence beginning with a group that requires thelongest time to diagnose the corresponding test sections.
 10. Arecording medium storing thereon a program that causes a test apparatusto function to test a device under test, the program causing: the testapparatus to function as: a plurality of test modules that test thedevice under test; and a control section that controls the plurality oftest modules; each test module to function as: a test section that teststhe device under test; and a self-diagnostic section that diagnosesoperation of the test section based on diagnostic data supplied thereto;and the control section to supply the diagnostic data in parallel toself-diagnostic sections for which the same type of diagnostic data isset, and to supply the diagnostic data sequentially to self-diagnosticsections for which a different type diagnostic data is set.